Patent holdings for IPC class H01J 11/52

Total number of patents in this class: 5

10-year publication summary

0
0
1
0
0
0
0
0
0
0
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Panasonic Corporation
20786
4
Tokyo Electron Limited
11599
1
Other owners 0